MRC Safety Tree
| Light Color | Status | Action |
|---|---|---|
| Green | Normal Conditions | Lab Open |
| Flashing Green | Equipment issue | Lab Open |
| Yellow | Low Air Flow or Gas Detection | Evacuate Cleanroom |
| Red | Fire Alarm or Gas Detection | Evacuate Building |
MRC Temperature and Humidity
NNF GCA Stepper
| Temperature | 70.7F |
|---|---|
| Humidity | 41.9% |
| Dewpoint | 46.4F |
NNF Contact Litho
| Temperature | 67.4F |
|---|---|
| Humidity | 48.2% |
| Dewpoint | 46.9F |