MRC Safety Tree
| Light Color | Status | Action |
|---|---|---|
| Green | Normal Conditions | Lab Open |
| Flashing Green | Equipment issue | Lab Open |
| Yellow | Low Air Flow or Gas Detection | Evacuate Cleanroom |
| Red | Fire Alarm or Gas Detection | Evacuate Building |
MRC Temperature and Humidity
NNF GCA Stepper
| Temperature | 70.5F |
|---|---|
| Humidity | 42.5% |
| Dewpoint | 46.5F |
NNF Contact Litho
| Temperature | 66.2F |
|---|---|
| Humidity | 50.8% |
| Dewpoint | 47.3F |